An excimer laser, sometimes more correctly called an exciplex laser, is a form of ultraviolet laser which is commonly used in the production of microelectronic devices, semiconductor based integrated circuits or "chips", eye surgery, and micromachining. The term excimer is short for 'excited dimer', while exciplex is short for 'excited complex'. Most excimer lasers are of the noble gas halide type, for which the term excimer is strictly speaking a misnomer (since a dimer refers to a molecule of two identical or similar parts): The correct but less commonly used name for such is exciplex laser. Wikipedia, Excimer Laser
See Also
Interaction of Intense Laser Pulses with Atomic Clusters - Measurements of Ion Emission Simulations and Applications
Laser Cluster Interactions
Models of Laser Cluster Interactions